Introduction.- FeedbackControl of Particle Size Distribution in Nanoparticle Synthesis andProcessing.- In situ optical sensingand state estimation in crystal growth.- Autonomous tip based 2-D mechanicalassembly of micro/nano-particles.- Atomic Force Microscopy: Principles andsystems viewpoint enabled methods.- Controlled Optical Trapping:Instrumentation, Methods, and Applications.- Control ofMEMS.- Tuned Vibratory Rate Sensors.- FeedbackControl of Micro-Flows for Liquid Shape and Particle Manipulation.- Problems in Control of Quantum Systems.- CommonThreads and Future Directions.
Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.
Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can Discusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among others Organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems Covers specific applications and the importance of controls in the use of MEMS Actuators, Untethered Microrobots, and Micro-Scale Inertial Sensors