Principles of Micro- and Nanofabrication.- Microfabrication Using X- ray Lithography.- Manufacturing High Aspect Ratio Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.- Diamond Microcutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Pulsed Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing.
Über den Autor
Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and was a Visiting Fellow at the University of Liverpool, U.K.
Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A. and U. S. Department of Energy.
Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.
Principles of Micro- and Nanofabrication.- Microfabriaction Using X-Ray Lithography.- Manufacturing High Aspect Ration Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.- Diamond Micro Cutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing.
This, the corrected second printing of Jackson's authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques.
It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.
The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated.
They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors.
Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.
The aim and scope of this book is to focus on providing the industrial and research community with a single source of information on micro and nanofabrication techniques. as they apply to a variety of engineering materials. The hands-on material in the book shows how to apply established and research based laboratory manufacturing techniques as they apply to a variety of engineering materials including silicon.