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    Autor
    ai-qun liu
    (1)
    gad-el-hak, mohamed
    (1)
    rahman, faiz
    (1)
    Schlagwort
    etch rates
    (4)
    electronics
    (3)
    technology & engineering
    (3)
    au thick film
    (2)
    diagnostic microtools
    (2)
    etch
    (2)
    general
    (2)
    lpcvd polysilicon
    (2)
    microelectronics
    (2)
    microfabrication techniques
    (2)
    nanotechnology & mems
    (2)
    nems device
    (2)
    polymeric sensors
    (2)
    propylene glycol methyl ether acetate
    (2)
    pzt film
    (2)
    self-assembly nanostructures
    (2)
    silicon carbide processing
    (2)
    stm image
    (2)
    surface micromachining
    (2)
    technology & industrial arts
    (2)
    x-ray lithography
    (2)
    x-ray mask
    (2)
    advanced optical switching
    (1)
    aeros
    (1)
    aerospace sen
    (1)
    beam
    (1)
    bi nanowire
    (1)
    cavity length
    (1)
    civil
    (1)
    cmos integration
    (1)
    cmos platform
    (1)
    comb drive
    (1)
    comb drive actuator
    (1)
    comb fingers
    (1)
    cycle time
    (1)
    deep
    (1)
    dry etching
    (1)
    electron
    (1)
    etching
    (1)
    experimental device simulation
    (1)
    external cavity
    (1)
    fib
    (1)
    gan lead
    (1)
    icp etching
    (1)
    insertion loss
    (1)
    integrated photonic circuits
    (1)
    ion
    (1)
    iop publishing
    (1)
    laser chip
    (1)
    lithography
    (1)
    metamaterials fabrication
    (1)
    microelectromechanical
    (1)
    micromachining
    (1)
    mikrowellentechnik
    (1)
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    (1)
    nanogap electrodes
    (1)
    nanoimprint
    (1)
    nanolithography methods
    (1)
    nanoscale device engineering
    (1)
    nanosphere lithography
    (1)
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    (1)
    nanowire growth
    (1)
    nil
    (1)
    optical microelectromechanical systems
    (1)
    optics & light
    (1)
    p
    (1)
    phc
    (1)
    photonic crystal device
    (1)
    photonic mems fabrication process
    (1)
    physics
    (1)
    piv recording
    (1)
    polysilicon surface micromachining
    (1)
    rate
    (1)
    rates
    (1)
    reactive
    (1)
    resonators
    (1)
    ring
    (1)
    s
    (1)
    science
    (1)
    sem
    (1)
    sem image
    (1)
    semiconductor processing
    (1)
    sic e
    (1)
    silicon photonics engineering
    (1)
    split
    (1)
    sputter yield
    (1)
    surface
    (1)
    system
    (1)
    thermo optic effect
    (1)
    thermo optic switch
    (1)
    thick film metallization
    (1)
    thin
    (1)
    transparent electrodes
    (1)
    tunable laser
    (1)
    tuning range
    (1)
    voas
    (1)
    wavelength tuning
    (1)
    wavelength tuning range
    (1)
    Erscheinungsjahr
    2005
    (1)
    2008
    (1)
    2012
    (1)
    2019
    (1)
    Ergebnis: 4 Artikel
    Schlagwort: etch rates

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